How to export EUV mask geomtry from FDTD into MATLAB ?

I would like to to perform Monte Carlo simulation on EUV mask blank. I already simulated the structure in FDTD. Is there any way that I can export the structure into MATLAB?

Answer 1

[Mathy]

Hi Hala,

I understand that you would like to import an FDTD simulation into MATLAB. Unfortunately, there are no built-in methods for this at the moment. However, there is a workaround available in a MATLAB Answer that explains how to extract points in 3D from scenario meshes. For more details, you can refer to the MATLAB Answer linked below:

https://www.mathworks.com/matlabcentral/answers/2118586-importing-geometry-from-cell-data-for-3d-model

Hope this helps!